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Wafer Bonding: Applications and Technology (Springer Series in Materials Science Book 75)

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Management number 233379559 Release Date 2026/06/27 List Price US$94.76 Model Number 233379559
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During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information. Read more

ASIN B000TDYE3W
XRay Not Enabled
ISBN13 978-3662108277
Edition 2004th
Language English
File size 9.9 MB
Page Flip Not Enabled
Publisher Springer
Word Wise Not Enabled
Print length 499 pages
Accessibility Learn more
Part of series Springer Series in Materials Science
Publication date March 9, 2013
Enhanced typesetting Not Enabled

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